Title :
Thermomagnetic residual offset in integrated Hall plates
Author :
Ruther, Patrick ; Schiller, Uwe ; Janke, Ralf ; Paul, Oliver
Author_Institution :
Microsystem Mater. Lab., Univ. of Freiburg, Germany
Abstract :
Integrated Hall plates show self-induced offset due to the current flow in their current leads. The magnetic field surrounding these current leads generates a magnetic offset signal, while their resistive heating causes thermoelectric offset voltages. This paper reports experimental results on these two effects. They are obtained using a novel test structure enabling to separate the two contributions. In addition, the experimental results concerning the thermal behavior of the test structure are compared with finite element (FE) simulations.
Keywords :
Hall effect transducers; compensation; magnetic sensors; thermomagnetic effects; Hall sensor; current flow; current leads; finite element simulations; integrated Hall plates; magnetic field; offset compensation; resistive heating; self-induced offset; test structure; thermal behavior; thermoelectric offset voltages; thermomagnetic residual offset; Finite element methods; Magnetic fields; Magnetic sensors; Magnetic separation; Signal generators; Temperature; Testing; Thermal sensors; Thermoelectricity; Voltage;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2003.820318