DocumentCode :
844514
Title :
A novel NO2 gas sensor based on Bis[phthalocyaninato] samarium complex/silicon hybrid charge-flow transistor
Author :
Xie, Dan ; Jiang, Yadong ; Ren, Tianling ; Liu, Litian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Volume :
3
Issue :
6
fYear :
2003
Firstpage :
796
Lastpage :
800
Abstract :
A new kind of sandwich-like bis[2,3,9,10,16,17,23,24-octakis(octyloxy)phthalocyaninato] samarium complex Sm[Pc*]2(Pc*=Pc(OC8H17)8) is used as film-forming material. Pure Sm[Pc*]2 and mixture of Sm[Pc*]2 and octadecanol(OA) deposited from both pure water and 10-4M Cd2+ subphases are investigated. It is found that a mixture of 1:3 Sm[Pc*]2:OA forms an excellent material for the fabrication of the gas-sensing Langmuir-Blodgett (LB) film by studying the film-forming characteristics. A new gas sensor has been fabricated by incorporating the multilayer LB film into the gate electrode of a metal-oxide-semiconductor field effect transistor, forming an array of charge-flow transistor. On the application of a gate voltage (VGS), greater than the threshold voltage (VTH), a delay was observed in the response of the drain current. This is due to the time taken for the resistive gas-sensing film to charge up to VGS. This delay characteristic was found to depend on the concentration of NO2. Results are presented showing that the device can detect reversibly the concentration of NO2 gas down to 5 ppm at room temperature.
Keywords :
Langmuir-Blodgett films; MOSFET; gas sensors; multilayers; nitrogen compounds; samarium compounds; silicon; Bis[phthalocyaninato] samarium complex/silicon hybrid; CFT; MOSFET; NO2; NO2 concentration; NO2 gas sensor; OA deposition; charge-flow transistor; delay; drain current; field effect transistor; film-forming characteristics; film-forming material; gas-sensing Langmuir-Blodgett film; gate electrode; gate voltage; metal-oxide-semiconductor; multilayer LB film; nitrogen dioxide; octadecanol; pure water; resistive gas-sensing film; room temperature; sandwich-like bis[2,3,9,10,16,17,23,24-octakis(octyloxy)phthalocyaninato] samarium complex; threshold voltage; Delay; Electrodes; FETs; Fabrication; Gas detectors; Nonhomogeneous media; Samarium; Sensor arrays; Temperature; Threshold voltage;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2003.820363
Filename :
1254557
Link To Document :
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