Title :
Manufacturing process of piezoelectric thin-film dual-stage actuator and its reliability for HDD
Author :
Kuwajima, Hideki ; Uchiyama, Hirokazu ; Ogawa, Yuko ; Kita, Hiroyuki ; Matsuoka, Kaoru
Author_Institution :
HD Dev. Center, Matsushita Electr. Ind. Co. Ltd., Osaka, Japan
fDate :
9/1/2002 12:00:00 AM
Abstract :
A new dual-stage actuator for positioning a magnetic head for high-density hard disk drives was proposed and developed. This dual-stage actuator device is characterized by the sputter-deposited thin-film PZT, featuring large displacement of 1.2 μm and high-resonance frequency over 15 kHz. In this paper, reliability against temperature, humidity, and mechanical shock was investigated to ensure the practical application to the drive products.
Keywords :
disc drives; hard discs; lead compounds; microactuators; piezoelectric actuators; piezoelectric thin films; reliability; sputter deposition; 1.2 micron; 15 kHz; HDD; PZT; PbZrO3TiO3; high-density hard disk drives; high-resonance frequency; humidity reliability; large displacement; magnetic head positioning; manufacturing process; mechanical shock reliability; microactuator; piezoelectric thin-film dual-stage actuator; reliability; sputter-deposited PZT thin-film; temperature reliability; Frequency; Hard disks; Humidity; Magnetic heads; Manufacturing processes; Piezoelectric actuators; Piezoelectric films; Sputtering; Temperature; Thin film devices;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2002.802798
