Title :
Experiment on the absolute measurement of a silicon lattice spacing at the NRLM
Author :
Tanaka, M. ; Nakayama, K. ; Kuroda, Kazuaki
Author_Institution :
Nat. Res. Lab. of Metrol., Ibaraki, Japan
fDate :
4/1/1989 12:00:00 AM
Abstract :
An experimental setup for the determination of the silicon lattice constant is described. The monolithic flexure hinge mechanisms for orientation adjustment, an optical interferometer for angle and displacement measurement, and a special tool for establishing the parallelism between the optical surface and the reciprocal lattice vector are introduced. The latest experiment gives a value for the ratio of the optical wavelength to the silicon lattice spacing which is consistent with more established values within a currently large uncertainty of one
Keywords :
angular measurement; displacement measurement; elemental semiconductors; lattice constants; light interferometry; silicon; NRLM; Si; absolute measurement; angle measurements; displacement measurement; lattice spacing; monolithic flexure hinge mechanisms; optical interferometer; optical surface; optical wavelength; orientation adjustment; parallelism; reciprocal lattice vector; Atomic measurements; Crystallization; Lattices; Metrology; Optical interferometry; Optical surface waves; Prototypes; Silicon; X-ray imaging; X-ray lasers;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
