Title :
Progress at IMGC in the absolute determination of the silicon d (220) lattice spacing
Author :
Basile, Giuseppe ; Bergamin, Angelo ; Cavagnero, Giovanni ; Mana, Giovanni ; Zosi, Gianfranco
Author_Institution :
Istituto di Metrol., Torino, Italy
fDate :
4/1/1989 12:00:00 AM
Abstract :
The use of the combined X-ray and optical interferometers to measure the (220) lattice spacing of silicon is summarized. The experimental apparatus and its main features are described. The ratio of the X-ray to the optical periods was measured and an analysis of the inherent systematic errors initiated. The experimental proofs of Abbe´s and cosine errors showed them to be the most important. A technique for correcting Abbe´s errors processing the X-ray fringes belonging to both diffracted and transmitted beams is described and a preliminary d 220 value is reported
Keywords :
X-ray applications; constants; interferometry; lattice constants; light interferometry; measurement errors; silicon; Abbe´s errors; IMGC; Si; X-ray fringes; X-ray interferometers; cosine errors; d(220) lattice spacing; d220 value; diffracted beams; optical interferometers; systematic errors; transmitted beams; Crystals; Error correction; Interferometers; Laser stability; Lattices; Optical attenuators; Optical coupling; Optical interferometry; Optical sensors; Silicon;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
