Title :
New actuation method for push-pull electrostatic MEMS comb drive
Author :
Zhao, Tao ; Liang, Yung C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
In this paper, a new actuation scheme for the push-pull electrostatic microelectromechanical systems comb drive actuators is proposed. The displacement amplitude excited by the new form of driving voltages can be more than three times as large as that which is achievable using the conventional form for the same applied system voltage.
Keywords :
drives; electrostatic actuators; microactuators; micromechanical devices; actuation method; applied system voltage; displacement amplitude; driving voltages; push-pull electrostatic MEMS comb drive; Electrodes; Electronic ballasts; Electrostatics; Equations; Fingers; Microelectromechanical systems; Micromechanical devices; Microstructure; Switching frequency; Voltage control;
Journal_Title :
Industrial Electronics, IEEE Transactions on
DOI :
10.1109/TIE.2003.819567
