Title :
The CantiClever: a dedicated probe for magnetic force microscopy
Author :
Van den Bos, Arnout ; Heskamp, Iwan ; Siekman, Martin ; Abelmann, Leon ; Lodder, Cock
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
fDate :
9/1/2002 12:00:00 AM
Abstract :
We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using. the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.
Keywords :
etching; magnetic force microscopy; micromachining; microsensors; silicon; CantiClever probe; Si; batch fabrication; cantilever design; high-resolution; magnetic tip; magnetic-force microscopy cantilever; precise dimensions control; silicon micromachining; single manufacturing process; very thin magnetic element; wet anisotropic etching; Atomic force microscopy; Magnetic anisotropy; Magnetic confinement; Magnetic force microscopy; Magnetic forces; Magnetic materials; Manufacturing processes; Perpendicular magnetic anisotropy; Probes; Shape;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2002.803585
