Title :
RF magnetron sputtered perovskite-oriented PSZT thin films on gold for piezoelectric and ferroelectric transducers
Author :
Bhaskaran, M. ; Sriram, S. ; Holland, A.S.
Author_Institution :
Microelectron. & Mater. Technol. Centre, RMIT Univ., Melbourne, Vic., Australia
Abstract :
Conditions for depositing perovskite-oriented Pb0.92Sr0.08(Zr0.65Ti0.35)O3 thin films on gold by RF magnetron sputtering are investigated. Deposition results were analysed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffractometry. It was found that the desired perovskite phase can be obtained at a substrate temperature of 300°C, much lower than the typically reported 650°C for deposition on platinum.
Keywords :
X-ray diffraction; X-ray photoelectron spectra; ferroelectric devices; ferroelectric thin films; gold; lead compounds; piezoelectric thin films; piezoelectric transducers; scanning electron microscopy; sputter deposition; strontium compounds; 300 C; PSZT thin-films; Pb0.92Sr0.08(Zr0.65Ti0.35)O3-Au; RF magnetron sputtering; X-ray diffractometry; X-ray photoelectron spectroscopy; ferroelectric transducers; perovskite phase; piezoelectric transducers; scanning electron microscopy;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20063422
