Title :
High-speed electron beam testing using an electron-optical phase shift element
Author :
Thong, J.T.L. ; Breton, B.C. ; Nixon, W.C.
Author_Institution :
Dept. of Eng., Cambridge Univ., UK
fDate :
11/10/1988 12:00:00 AM
Abstract :
An electron-optical element has been developed which delays electron pulses with continuous phase shift resolution. The inherently jitter-free method relies on the change of beam potential over a length of the optical path to modify the electron pulse transit time. Direct pulse measurements using 5 ps pulses demonstrate subpicosecond resolved delays while waveforms have been measured on coplanar lines
Keywords :
electron beam applications; electron optics; electronic equipment testing; phase shifters; scanning electron microscopy; SEM; continuous phase shift resolution; coplanar lines; electron beam testing; electron pulse transit time; electron-optical phase shift element; jitter-free method; subpicosecond resolved delays;
Journal_Title :
Electronics Letters
