Controlling the induced anisotropy in soft magnetic films for high-frequency applications

Author

Chezan, A.R. ; Craus, C.B. ; Chechenin, N.G. ; Vystavel, T. ; de Hosson, J.Th.M. ; Niesen, L. ; Boerma, D.O.

Author_Institution

Mater. Sci. Center, Groningen Univ., Netherlands

Volume

38

Issue

5

fYear

2002

fDate

9/1/2002 12:00:00 AM

Firstpage

3144

Lastpage

3146

Abstract

Nanocrystalline soft magnetic Fe-Zr-N films were successfully deposited by dc magnetron reactive sputtering. The nitrogen content was controlled by varying the Ar/N₂ ratio and/or the substrate temperature. The films have saturation magnetization and induced uniaxial anisotropy values in the range 17-21 kG and 0-30 Oe, respectively. The origin of the induced anisotropy is discussed. The films can be used as magnetic cores for inductors at gigahertz frequencies.

Keywords

Rutherford backscattering; X-ray diffraction; ferromagnetic materials; grain refinement; grain size; induced anisotropy (magnetic); interstitials; iron alloys; magnetic cores; magnetic hysteresis; magnetic thin films; nanostructured materials; soft magnetic materials; sputter deposition; sputtered coatings; texture; transmission electron microscopy; zirconium alloys; Fe-Zr-N; Rutherford backscattering; X-ray diffraction; average grain size; columnar structure; controlled nitrogen content; deposition conditions; deposition temperature; elastic recoil detection; grain refinement; growth rate; high-frequency applications; hysteresis loops; induced anisotropy control; interstitial octahedral sites; magnetic cores; magnetron reactive sputtered films; nanocrystalline soft magnetic films; saturation magnetization; texture; transmission electron microscopy; uniaxial anisotropy; Anisotropic magnetoresistance; Argon; Magnetic anisotropy; Magnetic films; Nitrogen; Perpendicular magnetic anisotropy; Saturation magnetization; Soft magnetic materials; Sputtering; Temperature control;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2002.802423

Filename

1042478