A megahertz switching DC/DC converter using FeBN thin film inductor

Author

Kim, Ki Hyeon ; Kim, Jongryoul ; Kim, Hee Jun ; Han, Suk Hee ; Kim, Hi Jung

Author_Institution

Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan

Volume

38

Issue

5

fYear

2002

fDate

9/1/2002 12:00:00 AM

Firstpage

3162

Lastpage

3164

Abstract

A dual spiral sandwiched thin film inductor with a dimension of 5 mm × 5 mm was fabricated by a LIGA-like micromachined process. FeBN magnetic films were used as a core material. The inductance and quality factor value of the inductor were measured approximately 1 μH and 4 up to 5 MHz, respectively. Using the FeBN film inductor, a hybrid dc/dc converter (15 mm × 12 mm × 1.5 mm) was designed and fabricated. The circuit topology of the converter was a zero voltage switching clamp voltage (ZVS-CV) buck converter. An input of 3.6 V was bucked to 2.7 V at a switching frequency of 1.8 MHz. The maximum power was 1.5 W. The measured efficiency of the buck converter reached a maximum value of 80% and kept stable up to 300 mA of load currents at 1.8 MHz.

Keywords

DC-DC power convertors; LIGA; Q-factor; boron compounds; inductors; iron compounds; magnetic cores; magnetic thin film devices; micromachining; 1.5 W; 1.8 MHz; 3.6 to 2.7 V; 300 mA; 5 MHz; 80 percent; FeBN; FeBN magnetic core; LIGA micromachining; circuit topology; dual spiral sandwiched thin film inductor; high-frequency characteristics; hybrid DC/DC converter; inductance; quality factor; zero voltage switching clamp voltage buck converter; Buck converters; DC-DC power converters; Inductance measurement; Magnetic cores; Magnetic films; Magnetic materials; Q factor; Spirals; Thin film inductors; Zero voltage switching;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2002.802401

Filename

1042484