Title :
Impurity atom diffusion into finite slices of semiconductor material
Author :
Kennedy, D.P. ; Murley, P.C.
Keywords :
Bismuth; Cyclotrons; Diffusion processes; Frequency; Plasma materials processing; Plasma temperature; Plasma waves; Semiconductor impurities; Semiconductor materials; Solid state circuits;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1963.1788
