Title :
Analysis of Linearity and Frequency Response of a Novel Piezoelectric Flextensional Actuator Using a Homodyne Interferometer and the J1−J4 Method
Author :
Marçal, Luiz Antônio Perezi ; Leão, José Vital Ferraz ; Nader, Gilder ; Higuti, Ricardo Tokio ; Kitano, Cláudio ; Silva, Emílio Carlos Nelli
Author_Institution :
Centro Universitario de Rio Preto, Sao Jose Do Rio Preto
fDate :
6/1/2007 12:00:00 AM
Abstract :
Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the J1-J4 method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance
Keywords :
Michelson interferometers; calibration; displacement measurement; frequency response; optical phase shifters; optimisation; piezoelectric actuators; topology; J1-J4 method; Michelson interferometer; PFA calibration factor; frequency response; homodyne interferometer; impedance analyzer; optical phase shift; piezoelectric flextensional actuator; piezoelectric transducers; signal demodulation; topology-optimization method; Demodulation; Displacement measurement; Frequency response; Hydraulic actuators; Linearity; Optical interferometry; Phase measurement; Phase shifting interferometry; Piezoelectric actuators; Piezoelectric transducers; Homodyne optical interferometer; nanometric displacement measurement; piezoelectric flextensional actuator (PFA);
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2007.894173
