DocumentCode :
850462
Title :
Simulations of Cascade Damage in Silicon
Author :
Mueller, G.P. ; Guenzer, C.S.
Author_Institution :
Naval Research Laboratory Washington, D. C. 20375
Volume :
27
Issue :
6
fYear :
1980
Firstpage :
1474
Lastpage :
1477
Abstract :
In an effort to better understand radiation damage to electronic materials, we use the binary-collision simulation code MARLOWE to model displacement cascades in silicon. We examine the average number of displacements produced by knock-on atoms as a function of their energy. The resulting vacancy-interstitial pairs are classified according to separation radius. We also examine a few particular cases of 100 keV cascades in silicon in order to highlight the importance that channeling has on the shape of displacement cascades.
Keywords :
Atomic measurements; Computational modeling; Computer simulation; Electronic components; Laboratories; Lattices; Shape; Silicon; Temperature; Tree data structures;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1980.4331054
Filename :
4331054
Link To Document :
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