Title :
Wide range center wavelength trimming of vertically coupled microring resonator filter by direct UV irradiation to SiN ring core
Author :
Haeiwa, Hirofumi ; Naganawa, Toshiki ; Kokubun, Yasuo
Author_Institution :
Dept. of Electr. & Comput. Eng., Yokohama Nat. Univ., Japan
Abstract :
We developed a precise and wide range ultraviolet (UV) trimming of the center wavelength of vertically coupled microring resonator, by using the direct UV irradiation to the SiN ring core. We discovered that the UV-induced refractive index change of SiN was -1.3×10-2 and there was no aging of refractive index after the UV irradiation. Utilizing this phenomenon, -12.1 nm of center wavelength shift was demonstrated without the aging effect for 1200 h.
Keywords :
micro-optics; multiplexing equipment; optical communication equipment; optical fabrication; optical resonators; optical waveguide filters; refractive index; silicon compounds; ultraviolet radiation effects; SiN; UV-induced refractive index change; add-drop filter; birefringence; center wavelength shift; direct UV irradiation; microring resonator filter; precise ultraviolet trimming; ring core; vertically coupled microring resonator; wide range center wavelength trimming; Aging; Optical films; Optical filters; Optical resonators; Optical ring resonators; Plasma measurements; Refractive index; Resonator filters; Silicon compounds; Wavelength measurement;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2003.818951
