Multistate latching MEMS variable optical attenuator

Author

Syms, R.R.A. ; Zou, Hailin ; Stagg, J. ; Moore, D.F.

Author_Institution

Opt. & Semicond. Devices Group, Imperial Coll. London, UK

Volume

16

Issue

1

fYear

2004

Firstpage

191

Lastpage

193

Abstract

A multistate latching variable optical attenuator (VOA) is demonstrated using microelectromechanical systems (MEMS) technology. The mechanism is used to fix the position of a shutter inserted into the optical path between two single-mode fibers. The mechanism and fiber mounts are fabricated in 85 μm thick silicon using bonded silicon-on-insulator material, by deep reactive ion etching. The device can be continuously adjusted or latched into a discrete set of attenuation states using a rack-and-tooth mechanism driven by electrothermal shape bimorph actuators. Electromechanical and optical characterization is performed to demonstrate a latching VOA function, with a maximum attenuation of 30 dB.

Keywords

dynamic response; micro-optics; microactuators; optical attenuators; optical control; optical fabrication; position control; silicon-on-insulator; sputter etching; MOEMS; Si; bonded silicon-on-insulator; deep reactive ion etching; discrete attenuation states; dynamic response; electrothermal shape bimorph actuators; high-frequency performance; microelectromechanical systems technology; multistate latching variable optical attenuator; optical path; rack-and-tooth mechanism; return loss; shutter position; simple flexure mechanism; single-layer patterning; single-mode fibers; Bonding; Electrothermal effects; Etching; Microelectromechanical systems; Micromechanical devices; Optical attenuators; Optical fiber devices; Optical materials; Particle beam optics; Silicon on insulator technology;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2003.820476

Filename

1255995