DocumentCode :
85144
Title :
Doping-Less Tunnel Field Effect Transistor: Design and Investigation
Author :
Kumar, M.J. ; Janardhanan, S.
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol., New Delhi, New Delhi, India
Volume :
60
Issue :
10
fYear :
2013
fDate :
Oct. 2013
Firstpage :
3285
Lastpage :
3290
Abstract :
Using calibrated simulations, we report a detailed study of the doping-less tunnel field effect transistor (TFET) on a thin intrinsic silicon film using charge plasma concept. Without the need for any doping, the source and drain regions are formed using the charge plasma concept by choosing appropriate work functions for the source and drain metal electrodes. Our results show that the performance of the doping-less TFET is similar to that of a corresponding doped TFET. The doping-less TFET is expected to be free from problems associated with random dopant fluctuations. Furthermore, fabrication of doping-less TFET does not require a high-temperature doping/annealing processes and therefore cuts down the thermal budget, opening up possibilities for fabricating TFETs on single crystal silicon-on-glass substrates formed by wafer scale epitaxial transfer.
Keywords :
elemental semiconductors; field effect transistors; semiconductor thin films; silicon; tunnel transistors; Si; calibrated simulations; charge plasma concept; doping-less TFET fabrication; doping-less tunnel field effect transistor; drain metal electrodes; drain regions; random dopant fluctuations; single crystal silicon-on-glass substrates; source metal electrodes; source regions; thermal budget; thin intrinsic silicon film; wafer scale epitaxial transfer; work functions; Charge carrier processes; Doping; Logic gates; Semiconductor process modeling; Silicon; Transistors; Tunneling; Band-to-band tunneling; charge-plasma; simulation; technology computer aided design (TCAD); tunnel field effect transistor (TFET);
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2013.2276888
Filename :
6581869
Link To Document :
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