DocumentCode
852424
Title
High performance RF power MOSFET
Author
Pathirana, G.P.V. ; Udrea, F.
Author_Institution
Dept. of Eng., Cambridge Univ., UK
Volume
38
Issue
21
fYear
2002
fDate
10/10/2002 12:00:00 AM
Firstpage
1286
Lastpage
1288
Abstract
A novel high voltage silicon RF LDMOSFET in SOI technology based on the 3D-RESURF concept is proposed. For the same blocking voltage rating, the new structure allows the LDMOSFET to have higher current handling capability at high gate voltages. This in turn causes the transconductance to be higher, leading to overall better RF performance.
Keywords
UHF field effect transistors; buried layers; power MOSFET; semiconductor device breakdown; semiconductor device models; silicon-on-insulator; 3D-RESURF concept; LDD resistance; RF power MOSFET; SOI technology; breakdown voltage; buried oxide; current handling capability; cutoff frequency; high performance; high transconductance; high voltage LDMOSFET; maximum unilateral gain; mobile charge; p-drift doping level;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20020859
Filename
1043724
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