Title :
A review of thirty-five years of laser trimming with a look to the future
Author_Institution :
Electro Sci. Industries Inc., Portland, OR, USA
fDate :
10/1/2002 12:00:00 AM
Abstract :
As devices and circuits become smaller and more complex, constant innovation is required from capital equipment suppliers. This is true in all of the ever-expanding applications of electronics including computers, telecommunications equipment, automobiles, and instruments. Lasers, usually focused down to micrometer-sized spots of energy, have become the fundamental tool for physically micromachining or exposing a wide variety of materials. Applications now range from printed circuit boards and hybrid circuits down to semiconductor devices. The following paper describes how computer-controlled work-cells based around the ubiquitous laser or laser systems, as they are called in the electronics industry, have changed the way all electronics products are manufactured.
Keywords :
integrated circuit manufacture; laser beam machining; reviews; semiconductor device manufacture; technological forecasting; computer-controlled workcells; electronics product manufacture; future prospects; hybrid circuits; laser exposure; laser trimming; micromachining; printed circuit boards; review; semiconductor devices; thick-film trimming; Application software; Automobiles; Circuits; Computer aided manufacturing; Instruments; Laser theory; Laser transitions; Semiconductor lasers; Technological innovation; Telecommunication computing;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2002.803668