DocumentCode
85369
Title
Experimental Investigation of the Tunneling Injection Boosters for Enhanced
ETSOI Tunnel FET
Author
Villalon, A. ; Le Royer, Cyrille ; Casse, M. ; Cooper, Daniel ; Hartmann, J.-M. ; Allain, F. ; Tabone, C. ; Andrieu, F. ; Cristoloveanu, S.
Author_Institution
Lab. for Electron. & Inf. Technol., French Atomic Energy & Alternative Energies Comm., Grenoble, France
Volume
60
Issue
12
fYear
2013
fDate
Dec. 2013
Firstpage
4079
Lastpage
4084
Abstract
We compare the performance of planar fully depleted silicon-on-insulator tunnel FETs (TFETs) with different tunneling boosters. The effectiveness of each of the following boosters is studied independently: low-bandgap channel or source-drain material as well as abrupt junction and ultrathin body. These boosters lead to an increase in the tunneling rate, and thus to enhanced ON current. The ION values of our devices vastly outperform literature results, paving the way for future CMOS-like TFET circuits.
Keywords
elemental semiconductors; energy gap; field effect transistors; silicon; silicon-on-insulator; tunnelling; CMOS-like TFET circuits; ION ETSOI tunnel FET; ION values; ON current; Si; low-bandgap channel; planar fully depleted silicon-on-insulator; source-drain material; tunneling boosters; tunneling injection boosters; tunneling rate; ultrathin body; Annealing; Logic gates; Silicon; Silicon germanium; Transistors; Tunneling; Band-to-band tunneling; complementary metal-oxide-semiconductor; field-effect transistor (FET); silicon-on-insulator; tunneling FET; tunneling boosters;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2013.2287610
Filename
6657754
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