Title :
Excellent epitaxial graphene layers grown simply on SiC substrates and their characterisation
Author :
Jeong, Sangkwon ; Lee, Edward ; Yim, Mark ; Yoon, Giwan
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
Abstract :
A few-layer-thick epitaxial graphene synthesised on both the up-side and the down-side surfaces of SiC wafers in an ultra-high vacuum annealing furnace is presented. The graphene grown on the down-side surfaces of the SiC wafers that contacted with a graphite pedestal resulted in a relatively lower sheet resistance along with less graphene layers, as compared with that of their up-side surfaces. Overall, the sheet resistance of the few-layer-thick graphene grown on the down-side was found to range from 200 to 3 Ω/□, depending on the annealing time.
Keywords :
annealing; electric resistance; graphene; semiconductor epitaxial layers; silicon compounds; substrates; C; SiC; SiC substrates; down-side surfaces; epitaxial graphene layers; sheet resistance; ultra-high vacuum annealing furnace; up-side surfaces;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2013.3391