Electrolyte-based on-demand and disposable microbattery

Author

Lee, Ki Bang ; Lin, Liwei

Author_Institution

Dept. of Mech. Eng., Univ. of California, Berkeley, CA, USA

Volume

12

Issue

6

fYear

2003

Firstpage

840

Lastpage

847

Abstract

A micromachined battery based on liquid electrolyte and metal electrodes for on-demand and disposable usages has been successfully demonstrated. The microbattery uses gold as the positive electrode and zinc as the negative electrode and is fabricated by using the standard surface micromachining technology. Two kinds of electrolytes have been tested, including the combination of sulfuric acid/hydrogen peroxide and potassium hydroxide. The operation of the battery can be on-demand by putting a droplet of electrolyte to activate the operation. Theoretical voltage and capacity of the microbattery are formulated and compared with experimental results. The experimental study shows that a maximum voltage of 1.5 V and maximum capacity of 122.2 μW-min have been achieved by using a single droplet of about 0.5 μl of sulfuric acid/hydrogen peroxide.

Keywords

electrochemical electrodes; electrolytes; free energy; gold; micromachining; micromechanical devices; secondary cells; silicon; zinc; 1.5 V; Au; Gibbs free energy; MEMS; Si; Zn; adhesive bonding; disposable microbattery; disposable micropower; electrochemical reactions; electrolyte-based on-demand microbattery; gold positive electrode; metal electrodes; micromachined battery; surface micromachining; zinc negative electrode; Actuators; Batteries; Electrodes; Gold; Micromachining; Micromechanical devices; Power generation; Power supplies; Voltage; Zinc;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2003.820272

Filename

1257362