A planar-type current detector composed of ultrathin Permalloy plates and sputtered electrodes operating over 10 MHz

A miniaturized planar-type current detector composed of ultrathin Permalloy plates has been developed. The detector with sputtered gold electrodes was capable of sensing the amplitude of a 20-MHz current. By taking into account the impedance matching of the transmission line between the device and the signal source, the amplitude and the phase of a 80-MHz current were detected with sufficient sensitivity by the trial detector. The detector can sense high-frequency current until the capacitance between the parallel plates influences the operation