Homoepitaxial growth of YBCO thin films an YBCO single crystals

Author

Konishi, M. ; Wen, J.G. ; Fuke, H. ; Matsunaga, Y. ; Hayashi, K. ; Odagawa, A. ; Enomoto, Y. ; Sakai, H. ; Yamada, Y. ; Koyama, S. ; Shiohara, Y.

Author_Institution

Supercond. Res. Lab., ISTEC, Tokyo, Japan

Volume

5

Issue

2

fYear

1995

fDate

6/1/1995 12:00:00 AM

Firstpage

1229

Lastpage

1232

Abstract

YBCO films were grown on [001] YBCO single crystal substrates using the off-axis RF magnetron sputtering method. The interface between the substrate and the film was observed using TEM. The crystal orientation of the film was found to be dependent on the growth temperature. C-axis oriented films with smooth interfaces and holes on their surfaces were obtained at 760/spl deg/C. A-axis oriented films grown at 580/spl deg/C had smooth surfaces, but the interface was rather poor. Lattice mismatches occurred at the interface due to deoxidization and oxidization of the substrate during the film growth-process.<>

Keywords

Josephson effect; barium compounds; high-temperature superconductors; oxidation; sputter deposition; superconducting epitaxial layers; superconducting thin films; transmission electron microscopy; vapour phase epitaxial growth; yttrium compounds; 580 C; 760 C; Josephson junctions; YBa/sub 2/Cu/sub 3/O/sub 7-x/ single crystals; YBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub 7/-YBa/sub 2/Cu/sub 3/O/sub 7/; a-axis oriented films; c-axis oriented films; crystal orientation; deoxidization; film growth-process; growth temperature; high temperature superconductors; homoepitaxial growth; lattice mismatches; off-axis RF magnetron sputtering; oxidization; smooth interfaces; superconducting thin films; surface holes; transmission electron microscopy; Atomic force microscopy; Crystals; Lattices; Radio frequency; Sputtering; Substrates; Superconducting films; Surface morphology; Transistors; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.402783

Filename

402783