Title :
Homoepitaxial growth of YBCO thin films an YBCO single crystals
Author :
Konishi, M. ; Wen, J.G. ; Fuke, H. ; Matsunaga, Y. ; Hayashi, K. ; Odagawa, A. ; Enomoto, Y. ; Sakai, H. ; Yamada, Y. ; Koyama, S. ; Shiohara, Y.
Author_Institution :
Supercond. Res. Lab., ISTEC, Tokyo, Japan
fDate :
6/1/1995 12:00:00 AM
Abstract :
YBCO films were grown on [001] YBCO single crystal substrates using the off-axis RF magnetron sputtering method. The interface between the substrate and the film was observed using TEM. The crystal orientation of the film was found to be dependent on the growth temperature. C-axis oriented films with smooth interfaces and holes on their surfaces were obtained at 760/spl deg/C. A-axis oriented films grown at 580/spl deg/C had smooth surfaces, but the interface was rather poor. Lattice mismatches occurred at the interface due to deoxidization and oxidization of the substrate during the film growth-process.<>
Keywords :
Josephson effect; barium compounds; high-temperature superconductors; oxidation; sputter deposition; superconducting epitaxial layers; superconducting thin films; transmission electron microscopy; vapour phase epitaxial growth; yttrium compounds; 580 C; 760 C; Josephson junctions; YBa/sub 2/Cu/sub 3/O/sub 7-x/ single crystals; YBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub 7/-YBa/sub 2/Cu/sub 3/O/sub 7/; a-axis oriented films; c-axis oriented films; crystal orientation; deoxidization; film growth-process; growth temperature; high temperature superconductors; homoepitaxial growth; lattice mismatches; off-axis RF magnetron sputtering; oxidization; smooth interfaces; superconducting thin films; surface holes; transmission electron microscopy; Atomic force microscopy; Crystals; Lattices; Radio frequency; Sputtering; Substrates; Superconducting films; Surface morphology; Transistors; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
