DocumentCode

855509

Title

Fabrication of thin film diodes using reactive sputtering

Author

Magill, P.J.

Volume

51

Issue

7

fYear

1963

fDate

7/1/1963 12:00:00 AM

Firstpage

1040

Lastpage

1040

Keywords

Anodes; Cathodes; Cooling; Counting circuits; Electrodes; Fabrication; Insulation; Semiconductor diodes; Semiconductor films; Sputtering;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/PROC.1963.2401

Filename

1444331