• DocumentCode
    855725
  • Title

    High-resolution electron microscopy: from imaging toward measuring

  • Author

    Van Aert, Sandra ; Den Dekker, Arnold J. ; van den Bos, A. ; Van Dyck, Dirk

  • Author_Institution
    Dept. of Appl. Phys., Delft Univ. of Technol., Netherlands
  • Volume
    51
  • Issue
    4
  • fYear
    2002
  • fDate
    8/1/2002 12:00:00 AM
  • Firstpage
    611
  • Lastpage
    615
  • Abstract
    High-resolution electron microscopy is discussed as a measuring, rather than an imaging, technique. It is shown that the interpretation or the images could greatly benefit from a quantitative instead of a qualitative approach accompanied by quantitative statistical experimental design.
  • Keywords
    design of experiments; electron microscopy; high-resolution electron microscopy; qualitative imaging instrument; quantitative measuring instrument; statistical experimental design; Atomic measurements; Design for experiments; Electron microscopy; High-resolution imaging; Image resolution; Instruments; Material properties; Nanostructured materials; Position measurement; Superconducting materials;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/TIM.2002.802250
  • Filename
    1044669
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=855725