Title :
Impact of Uniaxial Strain on Low-Frequency Noise in Nanoscale PMOSFETs
Author :
Kuo, Jack J -Y ; Chen, William P -N ; Su, Pin
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
fDate :
6/1/2009 12:00:00 AM
Abstract :
This letter investigates the low-frequency noise characteristics and reports a new mechanism for uniaxial strained PMOSFETs. Through a comparison of the input-referred noise and the trap density of the gate dielectric/semiconductor interface between co-processed strained and unstrained devices, it is found that the tunneling attenuation length for channel carriers penetrating into the gate dielectric is reduced by uniaxial strain. The reduced tunneling attenuation length may result in smaller input-referred noise, which represents an intrinsic advantage of low-frequency noise performance stemming from process-induced strain.
Keywords :
MOSFET; nanoelectronics; semiconductor device noise; channel carrier penetration; co-processed strained device; gate dielectric interface; low-frequency noise characteristics; nanoscale transistor; semiconductor interface; trap density; tunneling attenuation length; uniaxial strain PMOSFET; unstrained device; Interface state; low-frequency noise; process-induced strain; trap density; tunneling attenuation length; uniaxial strained PMOSFET;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2009.2020069