• DocumentCode
    856542
  • Title

    In-Liquid Quality Factor Improvement for Film Bulk Acoustic Resonators by Integration of Microfluidic Channels

  • Author

    Xu, Wencheng ; Zhang, Xu ; Yu, Hongyu ; Abbaspour-Tamijani, Abbas ; Chae, Junseok

  • Author_Institution
    Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ
  • Volume
    30
  • Issue
    6
  • fYear
    2009
  • fDate
    6/1/2009 12:00:00 AM
  • Firstpage
    647
  • Lastpage
    649
  • Abstract
    We demonstrate a significant improvement in the quality factor (Q) of film bulk acoustic resonators (FBARs) in liquid environments via the integration of microfluidic channels. Our device consists of a longitudinal-mode excited zinc oxide (ZnO) FBAR and parylene-encapsulated microfluidic channels. Considerable enhancement in the Q of the resonant system is obtained by confining the liquid in the microfluidic channels of thickness comparable to the acoustic wavelength. The improved FBAR achieves Q values of up to 120, which represents an improvement of a factor of eight over those of current state-of-the-art devices.
  • Keywords
    acoustic resonators; microfluidics; ZnO; film bulk acoustic resonator; longitudinal-mode excited zinc oxide; parylene-encapsulated microfluidic channel; quality factor; $Q$ factor; Acoustic resonators; microelectromechanical devices; piezoelectric resonators;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2009.2019973
  • Filename
    4914876
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=856542