Title :
Sputtered Pt/Co multilayers for magneto-optical recording
Author :
Carcia, P.F. ; Zeper, W.B.
Author_Institution :
E.I. du Pont de Nemours & Co., Wilmington, DE, USA
fDate :
9/1/1990 12:00:00 AM
Abstract :
By sputtering Pt/Co multilayers with either Kr or Xe instead of Ar, a large magnetic coercivity of ~1000 Oe suitable for magnetooptical recording was achieved. Sputtering with a larger-mass gas reduced both the flux and the energy of backreflected gas neutrals, which can mix Pt and Co layers and compromise magnetic properties. Multilayer-related Pt-Co alloys with perpendicular magnetic anisotropy and coercivities of 1-3.5 kOe were made by sputtering them at high Ar pressures (20-50 mTorr)
Keywords :
cobalt; cobalt alloys; coercive force; magnetic anisotropy; magnetic thin films; magneto-optical recording; platinum; platinum alloys; sputter deposition; 20 to 50 mtorr; Kr; Pt-Co; Pt-Co alloys; Xe; backreflected gas neutrals; magnetic coercivity; magnetic properties; magnetooptical recording; perpendicular magnetic anisotropy; sputtered multilayers; Argon; Coercive force; Magnetic anisotropy; Magnetic flux; Magnetic multilayers; Magnetic properties; Magnetooptic recording; Perpendicular magnetic anisotropy; Perpendicular magnetic recording; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
