Title :
Non-charge related mechanism affecting capacitive MEMS switch lifetime
Author :
Kucko, Jay F. ; Petrosky, James C. ; Reid, J. Robert ; Yeo, Yung Kee
Author_Institution :
Air Force Inst. of Technol., Wright Patterson AFB, OH
fDate :
3/1/2006 12:00:00 AM
Abstract :
Capacitive microelectromechanical system switches were operated for extended periods of time while tracking the voltages where the beam pulls-in and releases from the insulator surface. Changes in pull-in voltage are explained with charges tunneling from the beam into the insulator. However, charging cannot account for changes in the release voltage which result in switches sticking to the insulator. Pull-in and release voltage measurements provide valuable information on the processes limiting switch lifetime
Keywords :
capacitor switching; failure analysis; microswitches; reliability; tunnelling; capacitive microelectromechanical system switches; dielectric charging; micromachining; pull-in voltage; release voltage measurements; reliability; switch lifetime; Failure analysis; Force sensors; Insulation life; Microelectromechanical systems; Micromechanical devices; Microswitches; Switches; Testing; Tunneling; Voltage; Dielectric charging; micro-machining; microelectromechanical system (MEMS); microwave; millimeterwave; reliability;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2006.869796
