Non-charge related mechanism affecting capacitive MEMS switch lifetime

Author

Kucko, Jay F. ; Petrosky, James C. ; Reid, J. Robert ; Yeo, Yung Kee

Author_Institution

Air Force Inst. of Technol., Wright Patterson AFB, OH

Volume

16

Issue

3

fYear

2006

fDate

3/1/2006 12:00:00 AM

Firstpage

140

Lastpage

142

Abstract

Capacitive microelectromechanical system switches were operated for extended periods of time while tracking the voltages where the beam pulls-in and releases from the insulator surface. Changes in pull-in voltage are explained with charges tunneling from the beam into the insulator. However, charging cannot account for changes in the release voltage which result in switches sticking to the insulator. Pull-in and release voltage measurements provide valuable information on the processes limiting switch lifetime

Keywords

capacitor switching; failure analysis; microswitches; reliability; tunnelling; capacitive microelectromechanical system switches; dielectric charging; micromachining; pull-in voltage; release voltage measurements; reliability; switch lifetime; Failure analysis; Force sensors; Insulation life; Microelectromechanical systems; Micromechanical devices; Microswitches; Switches; Testing; Tunneling; Voltage; Dielectric charging; micro-machining; microelectromechanical system (MEMS); microwave; millimeterwave; reliability;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/LMWC.2006.869796

Filename

1603592