Title :
0.1 dB/cm waveguide losses in single-mode SOI rib waveguides
Author :
Fischer, U. ; Zinke, T. ; Kropp, J.-R. ; Arndt, F. ; Petermann, K.
Author_Institution :
Inst. fur Hochfrequenztech., Tech. Univ. Berlin, Germany
fDate :
5/1/1996 12:00:00 AM
Abstract :
Waveguide losses as low as 0.1 dB/cm at a wavelength of /spl lambda/=1.3 μm have been achieved in SOI rib waveguides fabricated by wet chemical etching. The single-mode waveguides have a large cross section yielding field mismatch losses to a standard single-mode fiber of only 0.17 dB/facet (both polarizations). Polarization independent fiber-chip-fiber insertion losses of 0.9 dB (best 0.5 dB) at a chip length of 60 mm have been measured.
Keywords :
etching; integrated optics; optical fabrication; optical fibre couplers; optical fibre losses; optical losses; optical waveguide components; optical waveguides; rib waveguides; silicon-on-insulator; 0.9 dB; 1.3 mum; Si-SiO/sub 2/; chip length; cross section; field mismatch losses; polarization independent fiber-chip-fiber insertion losses; single-mode rib waveguides; standard single-mode fiber; waveguide losses; wet chemical etching; Chemicals; Loss measurement; Optical coupling; Optical fiber devices; Optical fiber losses; Optical fiber polarization; Optical waveguides; Silicon on insulator technology; Wavelength measurement; Wet etching;
Journal_Title :
Photonics Technology Letters, IEEE
