Title :
Ferromagnetic Thin Films for Loss Reduction in On-Chip Transmission Lines
Author :
Amiri, Pedram Khalili ; Rejaei, Behzad ; Zhuang, Yan ; Vroubel, Marina ; Burghartz, Joachim N.
Author_Institution :
Delft Inst. of Microelectron. & Submicron Technol. (DIMES), Delft Univ. of Technol.
fDate :
6/1/2007 12:00:00 AM
Abstract :
Microstrip transmission lines fabricated on standard silicon wafers are shown to benefit from the incorporation of thin ferromagnetic Ni-Fe films when compared to control devices without Ni-Fe. At 1 GHz, inductance and quality factor of the microstrip lines are enhanced by factors of 6 and 3, respectively, while the characteristic impedance of a 20 mum wide line is increased by 85%. For constant characteristic impedance, a 200 nm thick Ni-Fe film reduces attenuation from 1.6 to 0.7 dB/cm at 500 MHz
Keywords :
Q-factor; eddy current losses; ferromagnetic materials; high-frequency transmission lines; inductance; iron alloys; magnetic leakage; magnetic thin films; microstrip lines; nickel alloys; 1 GHz; 20 mum; 200 nm; 500 GHz; NiFe; attenuation; ferromagnetic thin films; impedance; inductance; loss reduction; microstrip transmission lines; on-chip transmission lines; quality factor; silicon wafers; Attenuation; Impedance; Inductance; Microstrip; Propagation losses; Q factor; Semiconductor films; Silicon; Transistors; Transmission lines; Integrated circuit interconnections; magnetic microwave devices; microstrip; planar transmission lines;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2007.893708
