DocumentCode
858277
Title
Performance assessment of a multi-level repulsive-force out-of-plane microelectrostatic actuator
Author
He, S. ; Mrad, R.B.
Volume
31
Issue
2
fYear
2006
Firstpage
71
Lastpage
75
Keywords
Circuits; Electrodes; Electrostatic actuators; Helium; Microelectromechanical systems; Micromachining; Micromechanical devices; Numerical simulation; Springs; Voltage;
fLanguage
English
Journal_Title
Electrical and Computer Engineering, Canadian Journal of
Publisher
ieee
ISSN
0840-8688
Type
jour
DOI
10.1109/CJECE.2006.259187
Filename
4028890
Link To Document