• DocumentCode
    858297
  • Title

    Application of twin-beam structures for estimation of material properties and sensor fabrication

  • Author

    Bahreyni, Behraad ; Shafai, Cyrus

  • Volume
    31
  • Issue
    2
  • fYear
    2006
  • Firstpage
    85
  • Lastpage
    88
  • Keywords
    Fabrication; Insulation; Magnetic sensors; Material properties; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Piezoresistance; Piezoresistive devices; Stress;
  • fLanguage
    English
  • Journal_Title
    Electrical and Computer Engineering, Canadian Journal of
  • Publisher
    ieee
  • ISSN
    0840-8688
  • Type

    jour

  • DOI
    10.1109/CJECE.2006.259189
  • Filename
    4028892
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=858297