DocumentCode
858307
Title
A high-tuning-range MEMS variable capacitor using carrier beams
Author
Bakri-Kassem, Maher ; Mansour, Raafat R.
Volume
31
Issue
2
fYear
2006
Firstpage
89
Lastpage
95
Keywords
Capacitors; Frequency measurement; Microelectromechanical systems; Micromechanical devices; Polarization; Radio frequency; Springs; Steady-state; Tuning; Voltage;
fLanguage
English
Journal_Title
Electrical and Computer Engineering, Canadian Journal of
Publisher
ieee
ISSN
0840-8688
Type
jour
DOI
10.1109/CJECE.2006.259190
Filename
4028893
Link To Document