Title :
Planarized patterning of Y-Ba-Cu-O thin films for multilayer technology
Author :
Nilsson, P.A. ; Brorsson, G. ; Orliaguet, J.M. ; Olsson, E. ; Olin, H. ; Gustafsson, M. ; Claeson, T.
Author_Institution :
Dept. of Phys., Chalmers Univ. of Technol., Goteborg, Sweden
fDate :
6/1/1995 12:00:00 AM
Abstract :
Planarized layers of YBa/sub 2/Cu/sub 3/O/sub 7/ (YBCO) were made by etching trenches in SrTiO/sub 3/ (STO) substrates, laser depositing a YBCO film and mechanically polishing the film down to the substrate surface. These structures exhibited critical temperatures (T/sub c/) of 88 K and a critical-current density (J/sub c/) of 10/sup 6/ A/cm/sup 2/ at 77 K. The planarized surface was smooth, with a maximum height difference between the YBCO and STO of 20 nm. The surfaces were used as templates for epitaxial growth of multilayer insulators of STO and PrBa/sub 2/Cu/sub 3/O/sub 7/ (PBCO) and top YBCO layers. Complete crossovers, free of superconducting shorts, with T/sub c/ of 86 K and critical current density (J/sub c/) of 2/spl times/10/sup 5/ A/cm/sup 2/ were made.<>
Keywords :
barium compounds; critical current density (superconductivity); etching; high-temperature superconductors; polishing; superconducting thin films; superconducting transition temperature; yttrium compounds; PBCO; PrBa/sub 2/Cu/sub 3/O/sub 7/; STO substrates; SrTiO/sub 3/; YBCO thin films; YBa/sub 2/Cu/sub 3/O/sub 7/; critical temperature; critical-current density; crossovers; epitaxial growth; laser deposition; mechanical polishing; multilayer insulators; planarized patterning; templates; trench etching; Epitaxial growth; Etching; Insulation; Nonhomogeneous media; Substrates; Superconducting epitaxial layers; Surface emitting lasers; Temperature; Transistors; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
