Title :
Large-area growth of superconducting Y-Ba-Cu-O films by hot-wall sputtering method
Author :
Lin, R.J. ; Chen, L.I. ; Chin, C.C. ; Chen, Y.C.
Author_Institution :
Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fDate :
6/1/1995 12:00:00 AM
Abstract :
Superconducting Y-Ba-Cu-O films have been deposited on [001]MgO substrates with a diameter of two inches using a simple, economic hot-wall DC sputtering system. The deposition chamber was made of a quartz tube and heated by a tube-furnace outside the chamber. The deposited films are highly oriented with perpendicular to the surface of the The superconducting properties of the films across the 2-inch-diameter area are zero resistance temperatures T/sub c/(R=0) of 88-90 K and critical current densities J/sub c/(77 K) of 1.6-3.5/spl times/10/sup 6/ A/cm/sup 2/.<>
Keywords :
barium compounds; critical current density (superconductivity); high-temperature superconductors; sputter deposition; superconducting thin films; superconducting transition temperature; yttrium compounds; 77 K; 88 to 90 K; Y-Ba-Cu-O; Y-Ba-Cu-O films; critical current density; hot-wall sputtering; quartz tube deposition chamber; tube-furnace heating; zero resistance temperature; Laboratories; Plasma temperature; Pulsed laser deposition; Sputtering; Substrates; Superconducting coils; Superconducting films; Superconducting filters; Superconducting materials; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
