Title :
Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge
Author :
Itoh, A. ; Makabe, T. ; Shimura, N. ; Tougo, S.
Author_Institution :
Dept. of Electr. Eng., Keio Univ., Yokohama, Japan
fDate :
2/1/1996 12:00:00 AM
Abstract :
Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film
Keywords :
computerised tomography; discharges (electric); optical tomography; sputter deposition; sputtered coatings; sputtering; computer-aided tomographic imagings; deposited film; direct current magnetron discharge; four-axis industrial robot; optical absorption; optical emission; plasma structure; robotic system; sputtered particle; sputtering; three-dimensional discharge structure; tomographic imaging; visualization; Absorption; Computer industry; Optical computing; Optical films; Optical imaging; Plasma applications; Service robots; Sputtering; Stimulated emission; Tomography;
Journal_Title :
Plasma Science, IEEE Transactions on
