DocumentCode
860033
Title
Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge
Author
Itoh, A. ; Makabe, T. ; Shimura, N. ; Tougo, S.
Author_Institution
Dept. of Electr. Eng., Keio Univ., Yokohama, Japan
Volume
24
Issue
1
fYear
1996
fDate
2/1/1996 12:00:00 AM
Firstpage
109
Lastpage
110
Abstract
Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film
Keywords
computerised tomography; discharges (electric); optical tomography; sputter deposition; sputtered coatings; sputtering; computer-aided tomographic imagings; deposited film; direct current magnetron discharge; four-axis industrial robot; optical absorption; optical emission; plasma structure; robotic system; sputtered particle; sputtering; three-dimensional discharge structure; tomographic imaging; visualization; Absorption; Computer industry; Optical computing; Optical films; Optical imaging; Plasma applications; Service robots; Sputtering; Stimulated emission; Tomography;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.491736
Filename
491736
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