Title :
Distribution of excited species in plasmas by monochromatic imaging
Author :
Hareland, Willard A. ; Buss, Richard J.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
2/1/1996 12:00:00 AM
Abstract :
Spatial maps of individual argon atomic emissions are measured in the GEC (gaseous electronic conference) reference reactor by monochromatic imaging. The plasma discharge is viewed through a grating monochromator, and the images are recorded with an intensified charge-coupled device (CCD) array detector. Each atomic emission has a unique spatial profile that is related to the spatial energy distribution in the plasma
Keywords :
argon; charge-coupled devices; discharges (electric); plasma diagnostics; Ar; Ar atomic emissions; GEC reference reactor; charge-coupled device array detector; excited species distribution; gaseous electronic conference reference reactor; grating monochromator; monochromatic imaging; plasmas; spatial energy distribution; spatial maps; spatial profile; Argon; Atomic measurements; Charge coupled devices; Electrodes; Inductors; Plasma applications; Plasma materials processing; Plasma measurements; Plasma temperature; Plasma waves;
Journal_Title :
Plasma Science, IEEE Transactions on