Title :
Two-dimensional analysis of radio frequency discharges
Author :
Meyyappan, M. ; Govindan, T.R.
Author_Institution :
Sci. Res. Assoc. Inc., Glastonbury, CT, USA
fDate :
2/1/1996 12:00:00 AM
Abstract :
A two-dimensional (2-D) model for the charged particle transport in radio frequency capacitively coupled discharges is presented. The model consists of the three moments of the Boltzmann equation with rate constants for inelastic processes from a zero-dimensional Boltzmann solver. Variation of electron density, potential, and excitation rates inside the reactor is presented and discussed for an argon discharge
Keywords :
Boltzmann equation; argon; electron density; high-frequency discharges; plasma density; plasma diagnostics; plasma transport processes; Ar; Ar discharge; Boltzmann equation; charged particle transport; electron density; excitation rates; inelastic processes; potential; radio frequency capacitively coupled discharges; rate constants; two-dimensional analysis; zero-dimensional Boltzmann solver; Argon; Boltzmann equation; Electrodes; Electrons; Fault location; Inductors; Plasma density; Plasma temperature; Poisson equations; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
