Title :
Author\´s reply [to comments on "A shield-based three-port de-embedding method for microwave on-wafer characterization of deep-submicrometer silicon MOSFETs"]
Author :
Cho, Ming-Hsiang
Author_Institution :
Nat. Nano Device Labs., Hsinchu, Taiwan
fDate :
3/1/2006 12:00:00 AM
Abstract :
For original article by Ming-Hsiang Cho et al. see ibid., vol.53, no.9, p.2926-34, Sep. 2005. For comments by T. Kaija and P. Heino see ibid., vol.54, no.3, p.1295-6, March 2006.
Keywords :
MOSFET; S-parameters; microwave measurement; multiport networks; semiconductor device measurement; semiconductor device testing; silicon; Si; deep-submicrometer MOSFET; dummy fixture set; microwave on-wafer characterization; scattering parameters; shield-based three-port de-embedding method; Data mining; Electrical resistance measurement; Fixtures; Impedance; Leg; MOSFETs; Microwave devices; Microwave transistors; Silicon; Testing;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2006.869699
