Title :
Review of Fabrication and Characterization of Nd–Fe–B Thick Films for Magnetic Micromachines
Author :
Nakano, M. ; Sato, S. ; Yamashita, F. ; Honda, T. ; Yamasaki, J. ; Ishiyama, K. ; Itakura, M. ; Fidler, J. ; Yanai, T. ; Fukunaga, H.
Author_Institution :
Dept. of Electr. Eng. & Electron., Nagasaki Univ.
fDate :
6/1/2007 12:00:00 AM
Abstract :
Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 mum/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH) max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the isotropic films were introduced
Keywords :
annealing; boron alloys; coercive force; iron alloys; magnetic thin films; micromechanical devices; neodymium alloys; pulsed laser deposition; small electric machines; NdFeB; anisotropic thick films; annealing; coercivity; high-speed pulsed laser deposition method; isotropic thick film magnets; magnetic micromachines; Annealing; Coercive force; Heating; Magnets; Micromagnetics; Optical device fabrication; Optical pulses; Pulsed laser deposition; Substrates; Thick films; Laser ablation; micromachines; micromotors; thick film devices;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2007.893778
