• DocumentCode
    860911
  • Title

    Electrothermal frequency tuning of a nano-resonator

  • Author

    Jun, S.C. ; Huang, X.M.H. ; Hone, J.

  • Author_Institution
    Dept. of Mech. Eng., Columbia Univ., New York, NY
  • Volume
    42
  • Issue
    25
  • fYear
    2006
  • Firstpage
    1484
  • Lastpage
    1485
  • Abstract
    Electrothermal tuning of nanomechanical silicon carbide resonators has been demonstrated. The detected mechanical resonance of the untuned resonator was 10.12 MHz and has a quality factor of about 2000 as measured using the magnetomotive transduction technique. Also, the resonance frequency was tuned by 10% with Joule heating of DC current
  • Keywords
    Q-factor; micromechanical resonators; silicon compounds; tuning; wide band gap semiconductors; 10.12 MHz; DC current Joule heating; NEMS; SiC; electrothermal tuning; magnetomotive transduction; mechanical resonance; nanomechanical resonator; quality factor;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20062883
  • Filename
    4030693
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=860911