Title :
Fabrication of YBCO superconducting dual mode resonator for satellite communication
Author :
Sang Yeol Lee ; Kwang Yong Kang ; Dal Ahn
Author_Institution :
Res. Dept., ETRI, Taejon, South Korea
fDate :
6/1/1995 12:00:00 AM
Abstract :
Superconducting YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) thin films have been grown epitaxially on (100) MgO substrates of laser ablation technique. Superconducting properties of YBCO thin films on MgO substrates have been investigated by X-ray diffraction pattern, scanning electron microscope, transport and magnetized T/sub c/ measurements. Superconducting dual mode disk resonators were designed by microwave design software, EEsof and fabricated by photolithography and wet-etch process using YBa/sub 2/Cu/sub 3/O/sub 7-x/, superconducting thin films with T/sub c/ of 87 K. The unloaded quality factor of the superconducting dual mode disk resonator was measured to be 1312 at 77 K by a HP8510B vector network analyzer. A clear resonant frequency splitting in the frequency range of 7.7-9.7 GHz was observed in a perturbed dual mode disk resonator. This type of dual mode disk resonator could be utilized as a dual mode resonator filter for satellite communication.<>
Keywords :
Q-factor; X-ray diffraction; barium compounds; electron device manufacture; etching; high-temperature superconductors; laser ablation; photolithography; satellite communication; scanning electron microscopy; superconducting microwave devices; superconducting resonators; superconducting thin films; yttrium compounds; 7.7 to 9.7 GHz; 77 K; 87 K; HTS resonators; MgO; X-ray diffraction pattern; YBa/sub 2/Cu/sub 3/O/sub 7/-MgO; disk resonators; laser ablation technique; magnetized T/sub c/ measurements; microwave design; perturbed dual mode; photolithography; resonant frequency splitting; satellite communication; scanning electron microscope; superconducting dual mode resonator; superconducting thin films; unloaded quality factor; vector network analyzer; wet-etch process; Laser ablation; Laser modes; Optical device fabrication; Satellite communication; Substrates; Superconducting epitaxial layers; Superconducting microwave devices; Superconducting thin films; X-ray lasers; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
