DocumentCode :
862124
Title :
Impurity atom distribution from a two-step diffusion process
Author :
Kennedy, D.P. ; Murley, P.C.
Volume :
52
Issue :
5
fYear :
1964
fDate :
5/1/1964 12:00:00 AM
Firstpage :
620
Lastpage :
621
Keywords :
Boundary conditions; Conducting materials; Conductors; Diffusion processes; Equations; Fabrication; Geometry; Semiconductor impurities; Semiconductor materials; Temperature;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1964.3018
Filename :
1444948
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=862124
