Title :
Highly Sensitive ZnO Nanowire Acetone Vapor Sensor With Au Adsorption
Author :
Chang, Shoou-Jinn ; Hsueh, Ting-Jen ; Chen, I-Cherng ; Hsieh, Shang-Fu ; Chang, Sheng-Po ; Hsu, Cheng-Liang ; Lin, Yan-Ru ; Huang, Bohr-Ran
Author_Institution :
Inst. of Microelectron. & the Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan
Abstract :
In this study, the growth of high-density single-crystalline ZnO nanowires on patterned ZnO:Ga/ SiO2/Si templates was reported. We also adsorbed Au onto nanowire surfaces and fabricated ZnO nanowire acetone vapor sensors. With 200-ppm acetone vapor concentration, it was found that we could enhance the device sensitivities at 300deg C from 18.5% to 82.5% by Au adsorption. It was also found that measured responses at 300degC were around 52%, 61%, 71%, 77%, and 82% when the accumulative acetone vapor concentration reached 5, 10, 50, 100, and 200 ppm, respectively, for the ZnO nanowire sensor with Au adsorption.
Keywords :
II-VI semiconductors; adsorption; gallium; gold; nanofabrication; nanowires; sensors; silicon; silicon compounds; wide band gap semiconductors; zinc compounds; Au; Si; ZnO; ZnO:Ga-SiO2-Si; adsorption; device sensitivity; high-density single-crystalline nanowire fabrication; nanowire acetone vapor sensors; temperature 300 C; Acetone sensor; Au adsorption; ZnO; nanowires;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2008.2005917
