DocumentCode :
864062
Title :
Noncontacting low-cost instrument for film thickness measurement
Author :
Root, Loren F. ; Kaufman, Irving
Author_Institution :
Motorola, Arlington Heights, IL, USA
Volume :
41
Issue :
6
fYear :
1992
fDate :
12/1/1992 12:00:00 AM
Firstpage :
1014
Lastpage :
1019
Abstract :
A low-cost, noncontacting, nondestructive technique is presented for measuring the thickness of thin liquid or solid films and coatings in real time by utilizing the resonance properties of microstrip structures. A new measurement system in which all the microwave components are internal to the instrument, thereby eliminating the need for microwave test equipment, is described. Only a low-voltage DC source, such as a battery, is required to power the unit; the output is also a DC voltage or current. Using a linear model, sample coefficients of determination, r2, greater than 0.98 have been obtained for film thickness measurements of water, enamel paint, and silicon rubber up to 0.8-1.5- and 2-mm thick, respectively. Copper sheet metal up to 0.9-mm thick has been measured with an r2 greater than 0.99. The measurement range can be extended or improved even further if nonlinear circuit behavior is accounted for
Keywords :
microstrip lines; microwave measurement; thickness measurement; 0.8 mm; 0.9 mm; 1.5 mm; 2 mm; Cu; H2O; coatings; enamel paint; film thickness measurement; linear model; low-voltage DC source; microstrip structures; noncontacting instrument; nondestructive technique; nonlinear circuit; real time; resonance properties; sample coefficients; silicon rubber; solid films; thin liquid films; Battery charge measurement; Coatings; Instruments; Microstrip; Microwave devices; Microwave measurements; Resonance; Test equipment; Thickness measurement; Voltage;
fLanguage :
English
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9456
Type :
jour
DOI :
10.1109/19.199384
Filename :
199384
Link To Document :
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