Title :
A 3-D planar microlens for an effective monolithic optical interconnection system
Author :
Sung-Il Chang ; Jun-Bo Yoon
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
fDate :
4/1/2006 12:00:00 AM
Abstract :
A three-dimensional (3-D) planar microlens with curved sidewalls was fabricated by using the recently developed 3-D diffuser lithography and the polydimethylsiloxane (PDMS) replication method. The sidewall of the fabricated 3-D planar microlens had a radius of curvature of 140 μm, and a well-defined focal spot with a width of 1.5 μm and a height of 3 μm was observed. An excellent single-mode fiber-to-fiber coupling efficiency of 71% was demonstrated by applying the developed 3-D planar microlens, which displayed more than two times the coupling ability compared to that of a conventional two-dimensional planar microlens with straight sidewalls. Finally, it was verified that the coupling efficiency was little affected by variation in the process conditions used for the photoresist mold fabrication.
Keywords :
integrated optics; integrated optoelectronics; microlenses; monolithic integrated circuits; optical design techniques; optical fabrication; optical fibres; optical interconnections; photoresists; replica techniques; 1.5 mum; 3 mum; 3D diffuser lithography; 3D planar microlens; curved-sidewall microlens; fiber-to-fiber coupling efficiency; focal spot; lens fabrication; monolithic optical interconnection system; photoresist mold fabrication; polydimethylsiloxane replication method; single-mode coupling efficiency; two-dimensional planar microlens; Biomedical optical imaging; Integrated optics; Lenses; Lithography; Microoptics; Optical coupling; Optical device fabrication; Optical fibers; Optical interconnections; Resists; Diffuser; microlenses; optical detection; optical interconnection; polydimethylsiloxane (PDMS); three-dimensional (3-D) lithography;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2006.871840
