Title :
Sharp Bending of On-Chip Silicon Bragg Cladding Waveguide With Light Guiding in Low Index Core Materials
Author :
Yi, Yasha ; Akiyama, Shoji ; Bermel, Peter ; Duan, Xiaoman ; Kimerling, Lionel C.
Author_Institution :
MIT, Cambridge, MA
Abstract :
A novel on-chip Bragg cladding waveguide is designed and fabricated using conventional CMOS techniques. This optical waveguide has a low refractive index core surrounded by high index-contrast cladding bilayers. Polysilicon (n=3.5) and silicon nitride (n=2.0) are used for high index-contrast Bragg layers, where index difference is as high as 1.5. Our simulation shows that sharp bending in low index core materials can be achieved, which is not possible using index guiding mechanism. Within our approach, various on-chip applications are expected such as optical integration, high power transmission, biosensor/microelectromechanical system and so on
Keywords :
bending; claddings; integrated optics; optical design techniques; optical fabrication; optical waveguides; refractive index; silicon; silicon compounds; Bragg cladding waveguide; CMOS techniques; Si; SiN; biosensor; cladding bilayers; electromechanical system; high index-contrast bilayers; high power transmission; index guiding mechanism; light guiding; low index core materials; on-chip waveguide; optical integration; optical waveguide; polysilicon; refractive index; silicon nitride; silicon waveguide; waveguide bending; Biological materials; Biomedical optical imaging; CMOS technology; Optical materials; Optical refraction; Optical variables control; Optical waveguides; Refractive index; Silicon; System-on-a-chip; Bragg layers; low index core; optical waveguide;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2006.884067
