DocumentCode
865028
Title
Micromachined metal thin-film pressure sensor suitable for batch process
Author
Chung, G.S.
Author_Institution
Sch. Inf. Syst. Eng., Dongseo Univ., Pusan, South Korea
Volume
38
Issue
22
fYear
2002
fDate
10/24/2002 12:00:00 AM
Firstpage
1344
Lastpage
1346
Abstract
Description of the fabrication and characteristics of a micromachined metal thin-film pressure sensor for working at high temperatures is presented. The proposed pressure sensor consists of a Cr thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidised Si membranes with an Al interconnection layer. This sensor has the advantages of high sensitivity, high temperature operation and is suitable for batch process.
Keywords
batch processing (industrial); bridge instruments; chromium; high-temperature techniques; metallic thin films; micromachining; microsensors; pressure sensors; sputtered coatings; Al; Al interconnection layer; Cr; Cr thin film; Si; Wheatstone bridge; batch process; fabrication process; high temperature operation; micromachined metal thin film pressure sensor; sensitivity; sputter deposition; thermally oxidised Si membrane;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20020933
Filename
1047087
Link To Document